====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
--------------------------------------------------------------------
    Recoil/Damage Calculations made with Kinchin-Pease Estimates    
--------------------------------------------------------------------
----------------------------------------------------------------
  There are NO RECOILS unless a full TRIM calculation is made.   
----------------------------------------------------------------
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     4.E+04 A   Layer # 1- Density = 4.976E22 atoms/cm3 = 2.321 g/cm3
  Layer # 1- Si = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Ion Average Range =   299.6E+02 A   Straggling =   357.3E+01 A
 Ion Lateral Range =   313.7E+01 A   Straggling =   398.6E+01 A
 Ion Radial  Range =   497.9E+01 A   Straggling =   258.5E+01 A
====================================================================
 Range Skewne- = -001.4919  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 007.3235  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe       Recoil     
   (Ang.)       Ions     Distribution
-----------  ----------  ------------
400010.E-03  0.0000E+00  0.0000E+00
800010.E-03  0.0000E+00  0.0000E+00
120001.E-02  0.0000E+00  0.0000E+00
160001.E-02  0.0000E+00  0.0000E+00
200001.E-02  0.0000E+00  0.0000E+00
240001.E-02  0.0000E+00  0.0000E+00
280001.E-02  0.0000E+00  0.0000E+00
320001.E-02  0.0000E+00  0.0000E+00
360001.E-02  0.0000E+00  0.0000E+00
400001.E-02  0.0000E+00  0.0000E+00
440001.E-02  0.0000E+00  0.0000E+00
480001.E-02  0.0000E+00  0.0000E+00
520001.E-02  0.0000E+00  0.0000E+00
560001.E-02  0.0000E+00  0.0000E+00
600001.E-02  0.0000E+00  0.0000E+00
640001.E-02  0.0000E+00  0.0000E+00
680001.E-02  0.0000E+00  0.0000E+00
720001.E-02  0.0000E+00  0.0000E+00
760001.E-02  0.0000E+00  0.0000E+00
800001.E-02  0.0000E+00  0.0000E+00
840001.E-02  2.5000E+02  0.0000E+00
880001.E-02  0.0000E+00  0.0000E+00
920001.E-02  0.0000E+00  0.0000E+00
960001.E-02  2.5000E+02  0.0000E+00
100000.E-01  0.0000E+00  0.0000E+00
104000.E-01  0.0000E+00  0.0000E+00
108000.E-01  0.0000E+00  0.0000E+00
112000.E-01  0.0000E+00  0.0000E+00
116000.E-01  2.5000E+02  0.0000E+00
120000.E-01  0.0000E+00  0.0000E+00
124000.E-01  0.0000E+00  0.0000E+00
128000.E-01  0.0000E+00  0.0000E+00
132000.E-01  2.5000E+02  0.0000E+00
136000.E-01  0.0000E+00  0.0000E+00
140000.E-01  0.0000E+00  0.0000E+00
144000.E-01  0.0000E+00  0.0000E+00
148000.E-01  0.0000E+00  0.0000E+00
152000.E-01  0.0000E+00  0.0000E+00
156000.E-01  0.0000E+00  0.0000E+00
160000.E-01  5.0000E+02  0.0000E+00
164000.E-01  2.5000E+02  0.0000E+00
168000.E-01  2.5000E+02  0.0000E+00
172000.E-01  2.5000E+02  0.0000E+00
176000.E-01  5.0000E+02  0.0000E+00
180000.E-01  0.0000E+00  0.0000E+00
184000.E-01  2.5000E+02  0.0000E+00
188000.E-01  5.0000E+02  0.0000E+00
192000.E-01  5.0000E+02  0.0000E+00
196000.E-01  2.5000E+02  0.0000E+00
200000.E-01  5.0000E+02  0.0000E+00
204000.E-01  2.5000E+02  0.0000E+00
208000.E-01  7.5000E+02  0.0000E+00
212000.E-01  1.2500E+03  0.0000E+00
216000.E-01  7.5000E+02  0.0000E+00
220000.E-01  1.5000E+03  0.0000E+00
224000.E-01  7.5000E+02  0.0000E+00
228000.E-01  7.5000E+02  0.0000E+00
232000.E-01  5.0000E+02  0.0000E+00
236000.E-01  1.0000E+03  0.0000E+00
240000.E-01  2.5000E+03  0.0000E+00
244000.E-01  1.2500E+03  0.0000E+00
248000.E-01  1.7500E+03  0.0000E+00
252000.E-01  1.7500E+03  0.0000E+00
256000.E-01  4.0000E+03  0.0000E+00
260000.E-01  4.2500E+03  0.0000E+00
264000.E-01  6.0000E+03  0.0000E+00
268000.E-01  3.7500E+03  0.0000E+00
272000.E-01  5.5000E+03  0.0000E+00
276000.E-01  6.0000E+03  0.0000E+00
280000.E-01  6.2500E+03  0.0000E+00
284000.E-01  7.7500E+03  0.0000E+00
288000.E-01  9.2500E+03  0.0000E+00
292000.E-01  1.2500E+04  0.0000E+00
296000.E-01  1.2250E+04  0.0000E+00
300000.E-01  1.2000E+04  0.0000E+00
304000.E-01  1.2500E+04  0.0000E+00
308000.E-01  1.1500E+04  0.0000E+00
312000.E-01  1.3750E+04  0.0000E+00
316000.E-01  1.4250E+04  0.0000E+00
320000.E-01  1.6000E+04  0.0000E+00
324000.E-01  1.2250E+04  0.0000E+00
328000.E-01  1.1500E+04  0.0000E+00
332000.E-01  1.0750E+04  0.0000E+00
336000.E-01  1.1000E+04  0.0000E+00
340000.E-01  7.5000E+03  0.0000E+00
344000.E-01  6.5000E+03  0.0000E+00
348000.E-01  4.7500E+03  0.0000E+00
352000.E-01  3.7500E+03  0.0000E+00
356000.E-01  2.7500E+03  0.0000E+00
360000.E-01  7.5000E+02  0.0000E+00
364000.E-01  2.5000E+02  0.0000E+00
368000.E-01  7.5000E+02  0.0000E+00
372000.E-01  0.0000E+00  0.0000E+00
376000.E-01  5.0000E+02  0.0000E+00
380000.E-01  0.0000E+00  0.0000E+00
384000.E-01  0.0000E+00  0.0000E+00
388000.E-01  0.0000E+00  0.0000E+00
392000.E-01  0.0000E+00  0.0000E+00
396000.E-01  0.0000E+00  0.0000E+00
400000.E-01  0.0000E+00  0.0000E+00
